A STUDY ON SELECTIVE SiGe ETCH FOR THREE-DIMENSIONAL Si STRUCTURE APPLICATIONS

A STUDY ON SELECTIVE SiGe ETCH FOR THREE-DIMENSIONAL Si STRUCTURE APPLICATIONS

著者名:

H. Lee

掲載資料名:

Cleaning Technology in Semiconductor Device Manufacturing IX

シリーズ名:

ECS transactions

シリーズ巻号:

1(3)

発行年:

2006

開始ページ:

201

終了ページ:

206

総ページ数:

6

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774291 [1566774292]

言語:

英語

請求記号:

E23400/1-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047097
シリーズID:	PA00000034
会議名:	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
回次:	9th ; 2005
会議開催地:	Los Angeles, California, USA
会議開催年:	2005.10.00

類似資料:

1 国際会議録 DEVELOPMENT OF HIGH SELECTIVITY POLY-Si STRIP PROCESS BY USING REMOTE PLASMA J. Han, W. Shim, S. Choi, C. Hong, H. Cho, J. Moon Electrochemical Society	7 国際会議録 study of critical dimension and overlay measurement methodology using SEM image analysis for process control [6152-91] Lee, T. Y., Lee, B. H., Chin, S. B., Cho, Y. S, Hong, J. S., Song, C. L SPIE - The International Society of Optical Engineering
2 国際会議録 A study on selective Si0.8Ge0.2 etch using polysilicon etchant diluted by H20 for three-dimensional Si structure application Kim, S.M., Oh, C.W., Choe, J.D., Lee, C.S., Park, D.G. Electrochemical Society	8 国際会議録 Si/SiGe Epitaxy and Selective Etch Applications for Advanced Thin-Films MOSFET Structures N. Loubet, F. Boeuf, S. Monfray, C. Fenouillet-Beranger, S. Denorme Electrochemical Society
3 国際会議録 Study of Over-polishing at the Edge of a Pattern in Selective CMP Park, J.-H., Park, D.-W., Lee, J.-D., Hong, C., Han, W.-S., Moon., J.-T. Electrochemical Society	9 国際会議録 Interfield sampling method dependency of overlay and global alignment Hong,J., Lee,J., Cho,H., Moon,J., Lee,S. SPIE - The International Society for Optical Engineering
4 国際会議録 Three Dimensional Monte Carlo Simulations with Real Grain Orientations for the Role of Sub-Boundaries and Precipitates in Abnormal Grain Growth T.W. Na, C.S. Park, H.S. Shim, B.J. Lee, C.H. Han Trans Tech Publications	10 国際会議録 Copper Diffusion and Corrosion Behavior Through the Hillock Defect Found Beneath the Weak SiN Dielectric Barrier in Dual Damascene Process S. Kim, C. Shim, J. Hong, H. Lee, J. Han, K. Kim, Y. Kim Electrochemical Society
5 国際会議録 Analysis of dry etch loading effect in mask fabrication Lee,J.-Y., Cho,S.-Y., Kim,C.-H., Lee,S.-W., Choi,S.-W., Han,W.-S., Sohn,J.-M. SPIE-The International Society for Optical Engineering	11 国際会議録 Hole Mobility Behavior in Strained SiGe-on-SOI p-MOSFETs T. Shim, S. Kim, G. Lee, K. Kim, W. Cho Electrochemical Society
6 国際会議録 Application of substructuring method to three-dimensional optical lithography simulation Lee,S.G., Seo,C.-K., Lee,D.-H., Lee,J.-U., Cho,M. SPIE-The International Society for Optical Engineering	12 国際会議録 Way for LEEPL technology to succeed in memory device application Kim, I.-S., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12