Dry Etching of Sub-Micron Emitter in InP Heterojunction Double Bipolar Transistor Using Inductively Coupled Plasma
- 著者名:
P. Nam P. C. Chang D. Sawdai V. Gambin D. Scott J. Gonzalez D. Li G. S. Leslie X. Zeng J. Wang D. Matheson L. Dang R. Elmadjian C. Grossman M. Barsky A. Gutierrez-Aitken A. Oki S. Olson - 掲載資料名:
- State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 1(2)
- 発行年:
- 2006
- 開始ページ:
- 88
- 終了ページ:
- 93
- 総ページ数:
- 6
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774314 [1566774314]
- 言語:
- 英語
- 請求記号:
- E23400/1-2
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Sub Micron InP Double Heterojunction Bipolar Transistor with greater than 400 GHz Ft and Fmax
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