Investigation of Ohmic Contact Corrosion in GaAs HBT Fabrication
- 著者名:
- 掲載資料名:
- State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 1(2)
- 発行年:
- 2006
- 開始ページ:
- 75
- 終了ページ:
- 87
- 総ページ数:
- 13
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774314 [1566774314]
- 言語:
- 英語
- 請求記号:
- E23400/1-2
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society | |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
12
国際会議録
Comparison of Pd/Ge/Ti/Pt and Pd/Si/Ti/Pt Ohmic Contacts to N-Type InGaAs for AlGaAs/GaAs HBTs
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