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Investigation of Diamond Grit Size and Conditioning Force Effect on CMP Pads Topography

著者名:
掲載資料名:
Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
991
発行年:
2007
開始ページ:
45
終了ページ:
52
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999510 [1558999515]
言語:
英語
請求記号:
M23500/991
資料種別:
国際会議録

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