Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-Wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation
- 著者名:
Paul Stradins Oliver Kunz David L. Young Yanfa Yan Kim M. Jones Yueqin Xu Robert C. Reedy Howard M. Branz Armin G. Aberle Qi Wang - 掲載資料名:
- Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 989
- 発行年:
- 2007
- 開始ページ:
- 391
- 終了ページ:
- 398
- 総ページ数:
- 8
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558999497 [1558999493]
- 言語:
- 英語
- 請求記号:
- M23500/989
- 資料種別:
- 国際会議録
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