Weighted least-square approach for simultaneous measurement of multiple reflective surfaces
- 著者名:
- S. Tang ( KLA-Tencor (USA) )
- R. E. Bills ( KLA-Tencor (USA) )
- K. Freischlad ( KLA-Tencor (USA) )
- 掲載資料名:
- Optical manufacturing and testing VII : 28-29 August 2007, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6671
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819468192 [0819468193]
- 言語:
- 英語
- 請求記号:
- P63600/6671
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
ESA Communications |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
American Chemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
ESA Publications Division |
SPIE-The International Society for Optical Engineering |