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Measuring 3D geometries of microstructures with the laser-scanning confocal vibrometer microscope

著者名:
掲載資料名:
Optical Measurement Systems for Industrial Inspection V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6616
発行年:
2007
巻:
6616
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467584 [0819467588]
言語:
英語
請求記号:
P63600/6616
資料種別:
国際会議録

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