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Differential signal scatterometry overlay metrology: an accuracy investigation

著者名:
D. Kandel ( KLA-Tencor Corp. (Israel) )
M. Adel ( KLA-Tencor Corp. (Israel) )
B. Dinu ( KLA-Tencor Corp. (Israel) )
B. Golovanevsky ( KLA-Tencor Corp. (Israel) )
P. Izikson ( KLA-Tencor Corp. (Israel) )
V. Levinski ( KLA-Tencor Corp. (Israel) )
I. Vakshtein ( KLA-Tencor Corp. (Israel) )
P. Leray ( IMEC (Belgium) )
M. Vasconi ( STMicroelectronics (Italy) )
B. Salski ( QWED Sp. z.o.o. (Poland) )
さらに 5 件
掲載資料名:
Optical Measurement Systems for Industrial Inspection V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6616
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467584 [0819467588]
言語:
英語
請求記号:
P63600/6616
資料種別:
国際会議録

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