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Two-dimensional MEMS array for maskless lithography and wavefront modulation

著者名:
D. Lopez ( Alcatel Lucent, Bell Labs. (USA) )
V. A. Aksyuk ( Alcatel Lucent, Bell Labs. (USA) )
G. P. Watson ( Alcatel Lucent, Bell Labs. (USA) )
W. M. Mansfield ( Alcatel Lucent, Bell Labs. (USA) )
R. Cirelli ( Alcatel Lucent, Bell Labs. (USA) )
F. Klemens ( Alcatel Lucent, Bell Labs. (USA) )
F. Pardo ( Alcatel Lucent, Bell Labs. (USA) )
E. Ferry ( Alcatel Lucent, Bell Labs. (USA) )
J. Miner ( Alcatel Lucent, Bell Labs. (USA) )
T. W. Sorsch ( Alcatel Lucent, Bell Labs. (USA) )
M. Peabody ( Alcatel Lucent, Bell Labs. (USA) )
J. Bower ( Alcatel Lucent, Bell Labs. (USA) )
C. S. Pai ( Alcatel Lucent, Bell Labs. (USA) )
J. Gates ( Alcatel Lucent, Bell Labs. (USA) )
さらに 9 件
掲載資料名:
Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6589
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467171 [0819467170]
言語:
英語
請求記号:
P63600/6589
資料種別:
国際会議録

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