Blank Cover Image

Two-dimensional MEMS array for maskless lithography and wavefront modulation

著者名:
D. Lopez ( Alcatel Lucent, Bell Labs. (USA) )
V. A. Aksyuk ( Alcatel Lucent, Bell Labs. (USA) )
G. P. Watson ( Alcatel Lucent, Bell Labs. (USA) )
W. M. Mansfield ( Alcatel Lucent, Bell Labs. (USA) )
R. Cirelli ( Alcatel Lucent, Bell Labs. (USA) )
F. Klemens ( Alcatel Lucent, Bell Labs. (USA) )
F. Pardo ( Alcatel Lucent, Bell Labs. (USA) )
E. Ferry ( Alcatel Lucent, Bell Labs. (USA) )
J. Miner ( Alcatel Lucent, Bell Labs. (USA) )
T. W. Sorsch ( Alcatel Lucent, Bell Labs. (USA) )
M. Peabody ( Alcatel Lucent, Bell Labs. (USA) )
J. Bower ( Alcatel Lucent, Bell Labs. (USA) )
C. S. Pai ( Alcatel Lucent, Bell Labs. (USA) )
J. Gates ( Alcatel Lucent, Bell Labs. (USA) )
さらに 9 件
掲載資料名:
Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6589
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467171 [0819467170]
言語:
英語
請求記号:
P63600/6589
資料種別:
国際会議録

類似資料:

Kornblit, A., Aksyuk, V. A., R Bogart, G., Bolle, C., Bower, J.E., Cirelli, R. A., Ferry, E., Fetter, L., Gasparyan, A., …

Electrochemical Society

Krug, C., Baumvol, I.J.R., Stedile, F.C., Green, M.L., Klemens, F., Silverman, P.J., Sorsch, T.W., Alvarez, F., Hammer, …

Electrochemical Society

Lopez, D.O., Pardo, F., Aksyuk, V.A., Simon, M.E., Shea, H.R., Marom, D.M., Neilson, D.T., Cirelli, R.A., Klemens, F.P., …

SPIE-The International Society for Optical Engineering

H. Dyson, F. Pardo, R. Ryf, V. Aksyuk, R. Frahm

Society of Photo-optical Instrumentation Engineers

Pardo, F., Aksyuk, V.A., Arney, S., Bair, H., Basavanhally, N.R., Bishop, D.J., Bogart, G.R., Bolle, C.A., Bower, J.E., …

SPIE-The International Society for Optical Engineering

Bishop,D.J., Aksyuk,V.A., Bolle,C.A., Giles,C.R., Pardo,F., Walker,J.A.

SPIE-The International Society for Optical Engineering

Cirelli, R. A., Bude, J., Mansfield, W. M., Timp, G. L., Klemens, F. P., Watson, C. P., Weber, G. R., Sweeney, J R., …

SPIE - The International Society of Optical Engineering

Bishop,D.J., Aksyuk,V.A., Bolle,C.A., Giles,C.R., Pardo,F., Walker,J.A.

SPIE-The International Society for Optical Engineering

Rettig, C. L., Khodykin, O. V., Hoffman, J. R., Marx, W. F., Bowering, N. R., Vargas, E., Ershov, A. I., Fomenkov, I. …

SPIE - The International Society of Optical Engineering

Bishop,D.J., Aksyuk,V.A., Bolle,C.A., Giles,C.R., Pardo,F., Walker,J.A.

SPIE-The International Society for Optical Engineering

Watson,G.P., Kroyan,A., Cirelli,R.A., G,P Klemens, Timp,L., Nalamasu,O., Maynard,Lucent H.L., Sweeney,J.R., …

SPIE - The International Society for Optical Engineering

Bishop,D.J., Aksyuk,V.A., Bolle,C.A., Giles,C.R., Pardo,F., Walker,J.A.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12