Successful MWIR FPA fabrication using gas cluster ion-beam InSb surface finishing
- 著者名:
L. P. Allen ( Galaxy Compound Semiconductors, Inc. (USA) ) G. Dallas ( Galaxy Compound Semiconductors, Inc. (USA) ) K. Blanchet ( Galaxy Compound Semiconductors, Inc. (USA) ) S. R. Vangala ( Univ. of Massachusetts/Lowell (USA) ) C. Santeufemio ( Univ. of Massachusetts/Lowell (USA) ) W. D. Goodhue ( Univ. of Massachusetts/Lowell (USA) ) E. Roehl ( Lockheed-Martin - Santa Barbara Focalplane (USA) ) C. E. Jones ( Lockheed-Martin - Santa Barbara Focalplane (USA) ) J. Barton ( Indigo Systems Corp. (USA) ) B. Zide ( Epion Corp. (USA) ) V. Difilippo ( Epion Corp. (USA) ) K. S. Jones ( Univ. of Florida (USA) ) - 掲載資料名:
- Infrared technology and applications XXXIII : 9-13 April 2007, Orlando, Florida, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6542
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466648 [0819466646]
- 言語:
- 英語
- 請求記号:
- P63600/6542
- 資料種別:
- 国際会議録
類似資料:
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6
国際会議録
Preparation and Patterning of GaSb Surfaces With Br-IBAE for Antimonide Based Molecular Beam Epitaxy
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