Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers

Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers

著者名:

Y. Li ( Univ. of Florida (USA) )
T. Nishida ( Univ. of Florida (USA) )
D. P. Arnold ( Univ. of Florida (USA) )
M. Sheplak ( Univ. of Florida (USA) )

掲載資料名:

Sensors and smart structures, technologies for civil, mechanical, and aerospace systems

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6529

発行年:

2007

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466501 [0819466506]

言語:

英語

請求記号:

P63600/6529

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046836
シリーズID:	PA00000029
会議名:	Smart Structures : Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
回次:	2007
会議開催地:	San Diego, CA, USA
会議開催年:	2007.03.19-2007.03.22

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1 国際会議録 Modeling and optimization of a side-implanted piezoresistive shear-stress sensor [6174-07] Li, Y., Papila, M., Nishida, T., Cattafesta, L., Sheplak, M. SPIE - The International Society of Optical Engineering	7 国際会議録 A Dynamic Wall Shear Stress Sensor Based on Ionic Polymers A. Etebari, M. D. Bennett, D. J. Leo, P. P. Vlachos American Society of Mechanical Engineers
2 テクニカルペーパー A MEMS Shear Stress Sensor for Turbulence Measurements Y. Li, V. Chandrasekharan, B. Bertolucci, T. Nishida, L. Cattafesta, M. Sheplak American Institute of Aeronautics and Astronautics	8 国際会議録 Development of a new contact-type piezoresistive micro-shear-stress sensor Hsieh, M.C., Fang, Y.K., Ju, M.S., Ho, J.J., Ting, S.F. SPIE-The International Society for Optical Engineering
3 テクニカルペーパー Characterization of a MEMS-Based Floating Element Shear Stress Sensor V. Chandrasekharan, J. Sells, D. Arnold, M. Sheplak American Institute of Aeronautics and Astronautics	9 テクニカルペーパー Color Moiré Interferometry for Shear Stress Sensor Application T. Chen, S. Horowitz, M. Sheplak, G. Shoemaker American Institute of Aeronautics and Astronautics
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6 テクニカルペーパー A Micromachined Geometric Moir・Interferometric Floating-Element Shear Stress Sensor Horowitz, S., Chen, T., Chandrasekaran, V., Nishida, T., Cattafesta, L., Sheplak, M. American Institute of Aeronautics and Astronautics	12 テクニカルペーパー Dynamic Calibration Technique for Thermal Shear Stress Sensors with Variable Mean Flow Chandrasekaran, Venkataraman, Cain, Anthony, Nishida, Toshikazu, Sheplak, Mark American Institute of Aeronautics and Astronautics

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