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Comparison of techniques for measurement of residual stresses in multilayered micro-electro-mechanical devices

著者名:
  • M. Vechery ( Univ. of Maryland, College Park (USA) and Army Research Lab. (USA) )
  • A. Dick ( Univ. of Maryland, College Park (USA) )
  • B. Balachandran ( Univ. of Maryland, College Park (USA) )
  • M. Dubey ( Army Research Lab. (USA) )
掲載資料名:
Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6528
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466495 [0819466492]
言語:
英語
請求記号:
P63600/6528
資料種別:
国際会議録

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