Blank Cover Image

Lithography and yield sensitivity analysis of SRAM scaling for the 32nm node

著者名:
A. Nackaerts ( IMEC (Belgium) )
S. Verhaegen ( IMEC (Belgium) )
M. Dusa ( ASML Netherlands B.V. (Netherlands) )
H. Kattouw ( ASML Netherlands B.V. (Netherlands) )
F. van Bilsen ( ASML Netherlands B.V. (Netherlands) )
S. Biesemans ( IMEC (Belgium) )
G. Vandenberghe ( IMEC (Belgium) )
さらに 2 件
掲載資料名:
Design for manufacturability through design-process integration
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6521
発行年:
2007
巻:
6521
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466402 [0819466409]
言語:
英語
請求記号:
P63600/6521
資料種別:
国際会議録

類似資料:

S. Verhaegen, S. Cosemans, M. Dusa, P. Marchal, A. Nackaerts

Society of Photo-optical Instrumentation Engineers

S. Mimotogi, F. Uesawa, M. Tominaga, H. Fujise, K. Sho, M. Katsumata, H. Hane, A. Ikegami, S. Nagahara, T. Ema, M. …

SPIE - The International Society of Optical Engineering

Verhaegen, S., Nackaerts, A., Wiaux, V., Hendrickx, E., Vandenberghe, G.

SPIE - The International Society of Optical Engineering

Park, J.-S., Kim, S.-H., Shin, I.-K., Choi, S.-W., Sohn, J.-M., Lee, J.-H., Shin, H.-S., Laidig, T.L., Van den Broeke, …

SPIE - The International Society of Optical Engineering

Driessen, F.A., Zawadzki, M.T., Krishnan, P.R., Balasinski, A., Vandenberghe, G.

SPIE - The International Society of Optical Engineering

Kim,Y.-C., Vandenberghe,G.N., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Verhaegen, S., Nackaerts, A., Dusa, M., Carpaij, R., Vandenberghe, G., Finders, J.

SPIE - The International Society of Optical Engineering

Driessen, F.A., Pierrat, C., Vandenberghe, G., Ronse, K.G., Adrichem, P., Liu, H.-Y.

SPIE-The International Society for Optical Engineering

Jonckheere,R.M., Vandenberghe,G.N., Wiaux,V., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Lucas,K.D., Word,J.C., Vandenberghe,G.N., Verhaegen,S., Jonckheere,R.M.

SPIE-The International Society for Optical Engineering

Pierrat, C., Driessen, F.A.J.M., Vandenberghe, G.

SPIE-The International Society for Optical Engineering

12 国際会議録 KrF lithography for 130 nm

Finders,J., Schoot,J.B.van, Vanoppen,P., Dusa,M.V., Socha,R.J., Vandenberghe,G., Ronse,K.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12