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Double patterning design split implementation and validation for the 32nm node

著者名:
掲載資料名:
Design for manufacturability through design-process integration
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6521
発行年:
2007
巻:
6521
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466402 [0819466409]
言語:
英語
請求記号:
P63600/6521
資料種別:
国際会議録

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