Mechanism of immersion specific defects with high receding-angle topcoat
- 著者名:
M. Terai ( Mitsubishi Electric Corp. (Japan) ) T. Kumada ( Mitsubishi Electric Corp. (Japan) ) T. Ishibashi ( Renesas Technology Corp. (Japan) ) T. Hagiwara ( Renesas Technology Corp. (Japan) ) T. Hanawa ( Renesas Technology Corp. (Japan) ) T. Ando ( Tokyo Ohka Kogyo Co., Ltd. (Japan) ) T. Matsunobe ( Toray Research Ctr. Inc. (Japan) ) K. Okada ( Toray Research Ctr. Inc. (Japan) ) Y. Muraji ( Toray Research Ctr. Inc. (Japan) ) K. Yoshikawa ( Toray Research Ctr. Inc. (Japan) ) N. Man ( Toray Research Ctr. Inc. (Japan) ) - 掲載資料名:
- Advances in resist materials and processing technology XXIV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6519
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466389 [0819466387]
- 言語:
- 英語
- 請求記号:
- P63600/6519
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
国際会議録
Immersion specific defect mechanisms: findings and recommendations for their control [6154-180]
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
国際会議録
The effect of photoresist/topcoat properties on defect formation in immersion lithography [6153-59]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |