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Self-aligned self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly

著者名:
H. Kim ( IBM (USA) )
J. Cheng ( IBM (USA) )
C. Rettner ( IBM (USA) )
O. Park ( IBM (USA) )
R. Miller ( IBM (USA) )
M. Hart ( IBM (USA) )
L. Sundstrom ( IBM (USA) )
Y. Zhang ( IBM (USA) )
さらに 3 件
掲載資料名:
Advances in resist materials and processing technology XXIV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6519
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
言語:
英語
請求記号:
P63600/6519
資料種別:
国際会議録

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