Blank Cover Image

Application of carbon nanotube probes in a critical dimension atomic force microscope

著者名:
B. C. Park ( Korea Research Institute of Standards and Science (South Korea) )
J. Choi ( Korea Research Institute of Standards and Science (South Korea) and Chungnam National Univ. (South Korea) )
S. J. Ahn ( Korea Research Institute of Standards and Science (South Korea) )
D. Kim ( Korea Research Institute of Standards and Science (South Korea) )
J. Lyou ( Chungnam National Univ. (South Korea) )
R. Dixson ( National Institute of Standards and Technology (USA) )
N. G. Orji ( National Institute of Standards and Technology (USA) )
J. Fu ( National Institute of Standards and Technology (USA) )
T. V. Vorburger ( National Institute of Standards and Technology (USA) )
さらに 4 件
掲載資料名:
Metrology, inspection, and process control for microlithography XXI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6518
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
言語:
英語
請求記号:
P63600/6518
資料種別:
国際会議録

類似資料:

1 国際会議録 Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

R. Dixson, N. G. Orji

SPIE - The International Society of Optical Engineering
7 国際会議録 Carbon nanotube probes for three-dimensional critical-dimension metrology [6152-84]

Park, B. C., Ahn, S. J., Choi, J., Jung, K. Y., Song,W. Y.

SPIE - The International Society of Optical Engineering
2 国際会議録 Photomask applications of traceable atomic force microscope dimensional metrology at NIST

R. Dixson, N. G. Orji, J. Potzick, J. Fu, R. A. Allen

Society of Photo-optical Instrumentation Engineers
8 国際会議録 Measurement of pitch and width samples with the NIST calibrated atomic force microscope

Dixson,R., Koning,R., Vorburger,T.V., Fu,J., Tsai,V.W.

SPIE-The International Society for Optical Engineering
3 国際会議録 Traceable atomic force microscope dimensional metrology at NIST [6152-25]

Dixson, R., Orji, N. G., Fu, J., Cresswell, M., Allen, R., Guthrie, W.

SPIE - The International Society of Optical Engineering
9 国際会議録 Accuracy considerations for critical dimension semiconductor metrology

N. G. Orji, R. G. Dixson, B. D. Bunday, J. A. Allgair

Society of Photo-optical Instrumentation Engineers
4 国際会議録 Accurate dimensional metrology with atomic force microscopy

Dixson,R.G., Koning,R., Fu,J., Vorburger,T.V., Renegar,B.T.

SPIE - The International Society for Optical Engineering
10 国際会議録 Atomic force microscopy with carbon nanotube tip for critical dimension measurement

Park, B.C., Jung, K.Y., Song, W.Y., O, B.-H., Eom, T.B.

SPIE-The International Society for Optical Engineering
5 国際会議録 Dimensional metrology with the NIST calibrated atomic force microscope

Ronald G. Dixson, Rainer G. Koening, Vincent W. Tsai, Joseph Fu, Theodore V. Vorburger

SPIE - The International Society of Optical Engineering
11 国際会議録 Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

Wies, C., Lebert, R., Jagle, B., Juschkin, L., Sobel, F., Seitz, H., Walter, R., Laubis, C., Schoize, F., Biel, W., …

SPIE - The International Society of Optical Engineering
6 国際会議録 Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy

R. Dixson, J. Potzick, N. G. Orji

Society of Photo-optical Instrumentation Engineers
12 国際会議録 TEM calibration methods for critical dimension standards

N. G. Orji, R. G. Dixson, D. I. Garcia-Gutierrez, B. D. Bunday, M. Bishop, M. W. Cresswell, R. A. Allen, J. A. Allgair

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12