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The application of SMASH alignment system for 65-55-nm logic devices

著者名:
M. Miyasaka ( NEC Electronics Corp. (Japan) )
H. Saito ( NEC Electronics Corp. (Japan) )
T. Tamura ( NEC Electronics Corp. (Japan) )
T. Uchiyama ( NEC Electronics Corp. (Japan) )
P. Hinnen ( ASML (Netherlands) )
H. Lee ( ASML (Netherlands) )
M. van Kemenade ( ASML (Netherlands) )
M. Shahrjerdy ( ASML (Netherlands) )
R. van Leeuwen ( ASML (Netherlands) )
さらに 4 件
掲載資料名:
Metrology, inspection, and process control for microlithography XXI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6518
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
言語:
英語
請求記号:
P63600/6518
資料種別:
国際会議録

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