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Ultra-violet nanoimprint lithography applicable to thin-film transistor liquid-crystal display

著者名:
  • J. Jeong ( Korea Institute of Machinery and Materials (South Korea) )
  • K. Kim ( Korea Institute of Machinery and Materials (South Korea) )
  • D. Choi ( Korea Institute of Machinery and Materials (South Korea) )
  • J. Choi ( Korea Institute of Machinery and Materials (South Korea) )
  • E. Lee ( Korea Institute of Machinery and Materials (South Korea) )
掲載資料名:
Emerging lithographic technologies XI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6517
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466365 [0819466360]
言語:
英語
請求記号:
P63600/6517
資料種別:
国際会議録

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