Inductively coupled plasma etching of ZnO

Inductively coupled plasma etching of ZnO

著者名:

K. J. Nordheden ( Univ. of Kansas (USA) )
M. Dineen ( Oxford Instruments Plasma Technology (United Kingdom) )
C. Welch ( Oxford Instruments Plasma Technology (United Kingdom) )

掲載資料名:

Zinc oxide materials and devices II : 21-24 January, 2007, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6474

発行年:

2007

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465870 [0819465879]

言語:

英語

請求記号:

P63600/6474

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046782
シリーズID:	PA00000029
会議名:	Photonics West - Optoelectronic Materials and Devices : Zinc Oxide Materials and Devices
回次:	2007 : 2nd
会議開催地:	San Jose, California, USA
会議開催年:	2007.01.21-2007.01.24

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