Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor
- 著者名:
- H. K. Chu ( Univ. of Toronto (Canada) )
- J. K. Mills ( Univ. of Toronto (Canada) )
- W. L. Cleghorn ( Univ. of Toronto (Canada) )
- 掲載資料名:
- MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6464
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465771 [0819465771]
- 言語:
- 英語
- 請求記号:
- P63600/6464
- 資料種別:
- 国際会議録
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