Replication technology as a means of implementing polymer MOEMS
- 著者名:
J. T. Kim ( Electronics and Telecommunications Research Institute (South Korea) ) J. J. Ju ( Electronics and Telecommunications Research Institute (South Korea) ) S. Park ( Electronics and Telecommunications Research Institute (South Korea) ) S. K. Park ( Electronics and Telecommunications Research Institute (South Korea) ) M. Kim ( Electronics and Telecommunications Research Institute (South Korea) ) H. Lee ( ChemOptics, Inc. (South Korea) ) M. Lee ( Electronics and Telecommunications Research Institute (South Korea) ) - 掲載資料名:
- Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6462
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465757 [0819465755]
- 言語:
- 英語
- 請求記号:
- P63600/6462
- 資料種別:
- 国際会議録
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