Laser-assisted maskless fabrication of flexible electronics

Laser-assisted maskless fabrication of flexible electronics

著者名:

C. P. Grigoropoulos ( Univ. of California/Berkeley (USA) )
S. H. Ko ( Univ. of California/Berkeley (USA) )
H. Pan ( Univ. of California/Berkeley (USA) )
J. Chung ( Korea Univ. (South Korea) )
D. Poulikakos ( ETH Zurich (Switzerland) )

掲載資料名:

Laser-based micro-and nanopackaging and assembly : 22-24 January 2007, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6459

発行年:

2007

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465726 [0819465720]

言語:

英語

請求記号:

P63600/6459

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046767
シリーズID:	PA00000029
会議名:	SPIE LASE : Laser-based Micro- and Nanopackaging and Assembly
回次:	2007
会議開催地:	San Jose, California, USA
会議開催年:	2007.01.22-2007.01.24

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4 国際会議録 Laser micro/nanoprocessing for functional electronics S. H. Ko, H. Pan, C. P. Grigoropoulos Society of Photo-optical Instrumentation Engineers	10 テクニカルペーパー Double Laser Crystallization (DLC) of Pre- Patterned Amorphous Silicon Film and Amorphous Silicon Film with a Patterned Assisting SiO2 Layer Xu, L., Chung, J., Grigoropoulos, C. P. American Society of Mechanical Engineers
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