MEMS microshutter arrays for James Webb Space Telescope
- 著者名:
M. J. Li ( NASA Goddard Space Flight Ctr. (USA) ) T. Adachi ( NASA Goddard Space Flight Ctr. (USA) ) C. Allen ( NASA Goddard Space Flight Ctr. (USA) ) S. Babu ( NASA Goddard Space Flight Ctr. (USA) ) S. Bajikar ( NASA Goddard Space Flight Ctr. (USA) ) M. Beamesderfer ( NASA Goddard Space Flight Ctr. (USA) ) R. Bradley ( NASA Goddard Space Flight Ctr. (USA) ) K. Denis ( NASA Goddard Space Flight Ctr. (USA) ) N. Costen ( NASA Goddard Space Flight Ctr. (USA) ) A. Ewin ( NASA Goddard Space Flight Ctr. (USA) ) D. Franz ( NASA Goddard Space Flight Ctr. (USA) ) L. Hess ( NASA Goddard Space Flight Ctr. (USA) ) R. Hu ( NASA Goddard Space Flight Ctr. (USA) ) K. Jackson ( NASA Goddard Space Flight Ctr. (USA) ) M. Jhabvala ( NASA Goddard Space Flight Ctr. (USA) ) D. Kelly ( NASA Goddard Space Flight Ctr. (USA) ) T. King ( NASA Goddard Space Flight Ctr. (USA) ) G. Kletetschka ( NASA Goddard Space Flight Ctr. (USA) ) A. Kutyrev ( NASA Goddard Space Flight Ctr. (USA) ) B. Lynch ( NASA Goddard Space Flight Ctr. (USA) ) T. Miller ( NASA Goddard Space Flight Ctr. (USA) ) H. Moseley, Jr. ( NASA Goddard Space Flight Ctr. (USA) ) V. Mikula ( NASA Goddard Space Flight Ctr. (USA) ) B. Mott ( NASA Goddard Space Flight Ctr. (USA) ) L. Oh ( NASA Goddard Space Flight Ctr. (USA) ) J. Pontius ( NASA Goddard Space Flight Ctr. (USA) ) D. Rapchun ( NASA Goddard Space Flight Ctr. (USA) ) C. Ray ( NASA Goddard Space Flight Ctr. (USA) ) E. Schulte ( NASA Goddard Space Flight Ctr. (USA) ) S. Schwinger ( NASA Goddard Space Flight Ctr. (USA) ) P. Shu ( NASA Goddard Space Flight Ctr. (USA) ) R. Silverberg ( NASA Goddard Space Flight Ctr. (USA) ) W. Smith ( NASA Goddard Space Flight Ctr. (USA) ) S. Snodgrass ( NASA Goddard Space Flight Ctr. (USA) ) D. Sohl ( NASA Goddard Space Flight Ctr. (USA) ) L. Sparr ( NASA Goddard Space Flight Ctr. (USA) ) R. Steptoe-Jackson ( NASA Goddard Space Flight Ctr. (USA) ) V. Veronica ( NASA Goddard Space Flight Ctr. (USA) ) L. Wang ( NASA Goddard Space Flight Ctr. (USA) ) Y. Zheng ( NASA Goddard Space Flight Ctr. (USA) ) C. Zincke ( NASA Goddard Space Flight Ctr. (USA) ) - 掲載資料名:
- Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6415
- 発行年:
- 2007
- ペーパー番号:
- 64150B
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465238 [0819465232]
- 言語:
- 英語
- 請求記号:
- P63600/6415
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |