Research on the fiber point-diffraction interferometer for spherical figure measurement

Research on the fiber point-diffraction interferometer for spherical figure measurement

著者名:

L. Chen ( Beijing Institute of Technology (China) )
L. Nie ( Beijing Institute of Technology (China) )
T. Zhou ( Beijing Institute of Technology (China) )
D. Sha ( Beijing Institute of Technology (China) )

掲載資料名:

Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo -Electronic Technology, and Artificial Intelligence : 13-15 October 2006, Beijing, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6357

発行年:

2006

パート:

2

ペーパー番号:

63574J

開始ページ:

63574J-1

終了ページ:

63574J-7

総ページ数:

7

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464521 [081946452X]

言語:

英語

請求記号:

P63600/6357

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046714
シリーズID:	PA00000029
会議名:	International Symposium on Instrumentation and Control Technology
回次:	2006 : 6th
会議開催地:	Beijing, China
会議開催年:	2006.10.13-2006.10.15
論文注記:	63574J ; 6th International Symposium on Instrumentation and Control Technology, 13-15 October 2006, Beijing, China

類似資料:

1 国際会議録 Fiber point diffraction interferometer in measurement of spherical lens S. Wu, T. Zhou, J. Lin, L. Chen, L. Nie Society of Photo-optical Instrumentation Engineers	7 国際会議録 Design of laser source for fiber point diffraction interferometer X. Yu, L. Nie, J. Han, B. Liu, X. Jiang Society of Photo-optical Instrumentation Engineers
2 国際会議録 The comparison of two kinds of fiber phase shifting point-diffraction interferometer L. Chen, L. Nie, T. Zhou, D. Sha SPIE - The International Society of Optical Engineering	8 国際会議録 Rigorous accuracy analysis of the fiber point diffraction interferometer J. Han, L. Nie, X. Yu, X. Jiang, F. Wang Society of Photo-optical Instrumentation Engineers
3 国際会議録 Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer L. Chen, D. Sha Society of Photo-optical Instrumentation Engineers	9 国際会議録 Phase shifting interferograms processing for fiber point-diffraction interferometer L. Nie, J. Han, X. Yu, B. Liu, X. Jiang Society of Photo-optical Instrumentation Engineers
4 国際会議録 Wavefront fitting and evaluation of fiber point diffraction interferometer S. Wu, D. Sha, J. Lin, T. Zhou, L. Chen Society of Photo-optical Instrumentation Engineers	10 国際会議録 The simulation analysis of the scatterfield microscopy for the critical dimensions measurement L. Chen, D. Sha Society of Photo-optical Instrumentation Engineers
5 国際会議録 Key techniques in an absolute measurement method of spherical lens S. Wu, T. Zhou, D. Sha, J. Lin, L. Chen Society of Photo-optical Instrumentation Engineers	11 国際会議録 Absolute measurement of a spherical surface using a point diffraction interferometer Otaki,K., Bonneau,F., Ichihara,Y. SPIE - The International Society for Optical Engineering
6 国際会議録 Research of measurement assurance a program (MAP) for laser interferometer Feng, Y., Chen, L., Ren, J. R., Sha, D. SPIE-The International Society for Optical Engineering	12 国際会議録 A new source of a reference spherical wave for a point diffraction interferometer N. I. Chkhalo, A. Yu. Klimov, D. G. Raskin, V. V. Rogov, N. N. Salashchenko Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12