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Current Status of LSI Micro-Fabrication and Future Prospect for 3-D System Integration

著者名:
Kazuya Okamoto  
掲載資料名:
Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
970
発行年:
2007
開始ページ:
79
終了ページ:
90
総ページ数:
12
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999275 [1558999272]
言語:
英語
請求記号:
M23500/970
資料種別:
国際会議録

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