Growth of Crystalline Silicon Carbide by CVD Using Chlorosilane Gases

Growth of Crystalline Silicon Carbide by CVD Using Chlorosilane Gases

著者名:

M. J. Loboda

掲載資料名:

Silicon carbide 2006--materials, processing and devices : symposium held April 18-20, 2006, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

911

発行年:

2006

開始ページ:

49

終了ページ:

58

総ページ数:

10

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998674 [1558998675]

言語:

英語

請求記号:

M23500/911

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046615
シリーズID:	PA00000011
会議名:	MRS Spring Meeting : Symposium B
回次:	2006
会議開催地:	San Francisco, California, USA
会議開催年:	2006.04.18-2006.04.20

類似資料:

1 国際会議録 Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor MacMillan, M.F., Loboda, M.J., Chung, G., Carlson, E., Wan, J. Trans Tech Publications	7 国際会議録 HIGH GROWTH RATE OF SILICON CARBIDE ON SILICON (111) SUBSTRATES BY CHEMICAL VAPOR DEPOSITION USING TRIMETHYLSILANE Madapura, S., Steckl, A.J., Loboda, M. Electrochemical Society
2 国際会議録 Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System J.W. Wan, M.J. Loboda, M.F. MacMillan, G.Y. Chung, E.P. Carlson, V.M. Torres Trans Tech Publications	8 国際会議録 4H-SiC Epitaxy with Very Smooth Surface and Low Basal Plane Dislocation on 4 Degree Off-Axis Wafer G.Y. Chung, M.J. Loboda, J. Zhang, J.W. Wan, E.P. Carlson Trans Tech Publications
3 国際会議録 Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates M.F. MacMillan, M.J. Loboda, J.W. Wan, G.Y. Chung, E.P. Carlson, M.J. Spaulding, D. Deese Trans Tech Publications	9 国際会議録 A New Method of Mapping and Counting Micropipes In SiC Wafers Wan, J.W., Park, S.H., Chung, G., Carlson, E., Loboda, M.J. Trans Tech Publications
4 国際会議録 Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers G.Y. Chung, M.J. Loboda, M.F. MacMillan, J.W. Wan Trans Tech Publications	10 国際会議録 Advanced CVD Silicon Carbide Barrier Technology for Protection from Detrimental Gases L. Zambov, K. Weidner, V. Shamamian, R. Camilletti, U. Pernisz, S. Snow, M. Loboda, D. Gidley, H-G. Peng, R. Vallery Society of Vacuum Coaters
5 国際会議録 Carrier Lifetime Analysis by Microwave Photoconductive Decay (μ-PCD) for 4H SiC Epitaxial Wafers G.Y. Chung, M.J. Loboda, M.F. MacMillan, J.W. Wan, D.M. Hansen Trans Tech Publications	11 国際会議録 Nanocrystalline silicon carbide film growth using hot filament CVD Yu, M. B., Rusli, Yoon, S. F., Cui, J., Chew, K., Ahn, J., Zhang, Q. MRS-Materials Research Society
6 国際会議録 Defect Reduction in SiC Growth Using Physical Vapor Transport Darren M. Hansen, Mark J. Loboda, Roman V. Drachev, Edward K. Sanchez, Jie Zhang, Eric P. Carlson, Jianwei Wan, Gil … Materials Research Society	12 国際会議録 Micropipe Dissociation through Thick n+ Buffer Layer Growth M.F. MacMillan, E.K. Sanchez, M. Dudley, Y. Chen, M.J. Loboda Trans Tech Publications

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