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XRD and Photoluminescence Whole-Wafer Mapping of 4H-SiC Wafers

著者名:
T. Ryan
J. Hennessy
C. Harrison
S.Y. Wang
G. Webster
A. Majima
さらに 1 件
掲載資料名:
Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
シリーズ名:
Materials science forum
シリーズ巻号:
556-557
発行年:
2007
巻:
556-557
開始ページ:
299
終了ページ:
302
総ページ数:
4
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494422 [0878494421]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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