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Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System

著者名:
J.W. Wan
M.J. Loboda
M.F. MacMillan
G.Y. Chung
E.P. Carlson
V.M. Torres
さらに 1 件
掲載資料名:
Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
シリーズ名:
Materials science forum
シリーズ巻号:
556-557
発行年:
2007
巻:
556-557
開始ページ:
145
終了ページ:
148
総ページ数:
4
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494422 [0878494421]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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