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CVD of 6H-SiC on Non-Basal Quasi Polar Faces

著者名:
Y. Shishkin
S.P. Rao
O. Kordina
I. Agafonov
A.A. Maltsev
J. Hassan
A. Henry
C. Moisson
S.E. Saddow
さらに 4 件
掲載資料名:
Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
シリーズ名:
Materials science forum
シリーズ巻号:
556-557
発行年:
2007
巻:
556-557
開始ページ:
73
終了ページ:
76
総ページ数:
4
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494422 [0878494421]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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