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Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates

著者名:
M.F. MacMillan
M.J. Loboda
J.W. Wan
G.Y. Chung
E.P. Carlson
M.J. Spaulding
D. Deese
さらに 2 件
掲載資料名:
Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
シリーズ名:
Materials science forum
シリーズ巻号:
556-557
発行年:
2007
巻:
556-557
開始ページ:
69
終了ページ:
72
総ページ数:
4
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494422 [0878494421]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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