Nano-Structured TiN Thin Films Deposited by Single Ion Beam Reactive Sputtering
- 著者名:
Z. Bogdanov N. Popovic M. Zlatanovic B. Goncic Z. Rakocevic S. Zec - 掲載資料名:
- Research trends in contemporary materials science : YUCOMAT VIII : selected papers presented at the 8th Conference of the Yugoslav Materials Research Society, held in Herceg Novi, Montenegro September 4-8, 2006
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 555
- 発行年:
- 2007
- 開始ページ:
- 303
- 終了ページ:
- 308
- 総ページ数:
- 6
- 出版情報:
- Stafa-Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494415 [0878494413]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films
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