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Ti-N-C Films Deposited by Ion Beam Assisted MF Twin Targets Unbalanced Magnetron Sputtering

著者名:
掲載資料名:
Aerospace materials : Progress in light metals, aerospace materials and superconductors . 2006 BIMW : 2006 Beijing International Materials Week, June 25-30, 2006, Beijing, China
シリーズ名:
Materials science forum
シリーズ巻号:
546-549(3)
発行年:
2007
巻:
546-549
開始ページ:
1729
終了ページ:
1734
総ページ数:
6
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494323 [0878494324]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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