Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

著者名:

S.W. Kuk

掲載資料名:

Eco-materials processing and design VIII : ISEPD-8, proceedings of the 8th International Symposium on Eco-Materials Processing and Design, January 11-13, 2007, Kitakyushu, Japan

シリーズ名:

Materials science forum

シリーズ巻号:

544-545

発行年:

2007

開始ページ:

689

終了ページ:

692

総ページ数:

4

出版情報:

Stafa-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494316 [0878494316]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046600
シリーズID:	PA00000012
会議名:	ISEPD - International Symposium on Eco-Materials Processing and Design
回次:	2007 : 8th
会議開催地:	Kitakyushu, Japan
会議開催年:	2007.01.11-2007.01.13

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