Carbon Nanotubes Grown by Catalytic CVD on Silicon Based Substrates for Electronics Applications
- 著者名:
R. Rizzoli R. Angelucci S. Guerri A. Parisini G.P. Veronese V. Vinciguerra M.F. Bevilacqua - 掲載資料名:
- THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canad
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 539-543(1)
- 発行年:
- 2007
- 巻:
- 539-543
- 開始ページ:
- 669
- 終了ページ:
- 674
- 総ページ数:
- 6
- 出版情報:
- Stafa-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494286 [0878494286]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society | |
2
国際会議録
Large-scale integration of carbon nanotubes into silicon-based microelectronics (Invited Paper)
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Springer |
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SPIE-The International Society for Optical Engineering |
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5
国際会議録
Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.
Kluwer Academic Publishers |
Trans Tech Publications |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |