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Optimization method for transparent conducting oxide films prepared by DC magnetron sputtering [6149-80]

著者名:
Wang, J. ( Univ. of Electronic Science and Technology of China (China) )
Cheng, J. ( Univ. of Electronic Science and Technology of China (China) )
Lin, H. ( Univ. of Electronic Science and Technology of China (China) )
Jiang, Q. ( Univ. of Electronic Science and Technology of China (China) )
Yang, G. ( Univ. of Electronic Science and Technology of China (China) )
Jiang, Y. ( Univ. of Electronic Science and Technology of China (China) )
さらに 1 件
掲載資料名:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6149
発行年:
2006
開始ページ:
614928
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461889 [0819461881]
言語:
英語
請求記号:
P63600/6149
資料種別:
国際会議録

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