Effects of mask bias on the mask error enhancement factor (MEEF) for low k1 lithography process [5853-61]
- 著者名:
- Chang, Y. Y.
- Wu, Y.-H.
- Shih, C.-L.
- Lin, J. ( Nanya Technology Corp. (Taiwan) ) , ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
- Kan, F. ( Inotera Memories Inc. (Taiwan) )
- 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5853
- 発行年:
- 2005
- パート:
- 2
- 開始ページ:
- 757
- 終了ページ:
- 766
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458537 [0819458538]
- 言語:
- 英語
- 請求記号:
- P63600/5853
- 資料種別:
- 国際会議録
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