Reference pattern-based 2D measurement with nano resolution [6376-12]

Reference pattern-based 2D measurement with nano resolution [6376-12]

著者名:

Wang, Z.
Su, S. ( Cardiff Univ. (United Kingdom) )
Verevkin, Y. K. ( Institute of Applied Physics (Russia) )
Fatikow, S. ( Univ. of Oldenburg (Germany) )

掲載資料名:

Optomechatronic Micro/Nano Devices and Components II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6376

発行年:

2006

開始ページ:

63760M

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464743 [0819464740]

言語:

英語

請求記号:

P63600/6376

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016376
シリーズID:	PA00000029
会議名:	Optics East : Optomechatronic Micro/Nano Devices and Components
回次:	2006 : 2nd
会議開催地:	Boston, MA, USA
会議開催年:	2006.10.03-2006.10.04

類似資料:

1 国際会議録 Planning and control of a microassembly process in a flexible microrobot-based desktop station Fatikow,S., Santa,K. SPIE - The International Society for Optical Engineering	7 国際会議録 NanoHand: micro/nano system for automatic handling of nano-objects S. Fatikow, V. Eichhom, A. Sill, A. Steinecker, C. Meyer Society of Photo-optical Instrumentation Engineers
2 国際会議録 Automated micromanipulation desktop station based on mobile piezoelectric microrobots Fatikow,S. SPIE-The International Society for Optical Engineering	8 国際会議録 Prospects of Room-Temperature Microbolometer Based on CMR Thin Films Gillman, E. S., Noginova, N., Verevkin, A. Materials Research Society
3 国際会議録 Formation of 4-beam laser interference patterns for nanolithography J. Zhang, Z. Wang, Y. K. Verevkin, S. M. Olaizola, C. Peng, C. Tan, A. Rodriguez, E. Y. Daume, T. Berthou, S. Tisserand, … SPIE - The International Society of Optical Engineering	9 国際会議録 Automatic control system of a microrobot-based microassembly station using computer vision Fatikow,S., Buerkle,A., Seyfried,J. SPIE - The International Society for Optical Engineering
4 国際会議録 AFM-based force microsensor for a microrobot Fatikow, S., Fahlbusch, S. SPIE-The International Society for Optical Engineering	10 国際会議録 Strain measurement of a mouse bone by 3D-electronic speckle pattern interferometry (3D-ESPI) [5880-12] Samala,. P. R, Su, M, Liu, S., Jiang, H. H., Yokota, H., Yang, L. SPIE - The International Society of Optical Engineering
5 国際会議録 Vision feedback in an automatic nanohandling station inside an SEM (Invited Paper) [6376-11] Sievers, T., Jahnisch, M., Schrader, C., Fatikow, S. SPIE - The International Society of Optical Engineering	11 国際会議録 New Fourier transform profilometry based on modulation measurement Su,X.-Y., Su,L.-K., Li,W.-S. SPIE - The International Society for Optical Engineering
6 国際会議録 CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback D. Jasper, S. Fatikow Society of Photo-optical Instrumentation Engineers	12 国際会議録 Mechanism-dependent resolution for protein micro/nano-patterning Nicolau,D.V. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12