Segmented MEMS deformable-mirror for wavefront correction (Invited Paper) [6376-14]
- 著者名:
- Helmbrecht, M. A.
- He, M. ( Iris AO, Inc. (USA) )
- Juneau, T. ( SiTime Inc. (USA) )
- Hart, M. ( Owlstone Ltd. (United Kingdom) )
- Doble, N. ( Iris AO, Inc. (USA) )
- 掲載資料名:
- Optomechatronic Micro/Nano Devices and Components II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6376
- 発行年:
- 2006
- 開始ページ:
- 63760D
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464743 [0819464740]
- 言語:
- 英語
- 請求記号:
- P63600/6376
- 資料種別:
- 国際会議録
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