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Segmented MEMS deformable-mirror for wavefront correction (Invited Paper) [6376-14]

著者名:
掲載資料名:
Optomechatronic Micro/Nano Devices and Components II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6376
発行年:
2006
開始ページ:
63760D
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464743 [0819464740]
言語:
英語
請求記号:
P63600/6376
資料種別:
国際会議録

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