A novel low-coherence fibre optic interferometer for position and thickness measurements with unattained accuracy [6341-62]
- 著者名:
- Courteville, A.
- Wilhelm, R.
- Garcia, F. ( Fogale nanotech (France) )
- 掲載資料名:
- Speckle06: Speckles, From Grains to Flowers
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6341
- 発行年:
- 2006
- 開始ページ:
- 63411Q
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464262 [0819464260]
- 言語:
- 英語
- 請求記号:
- P63600/6341
- 資料種別:
- 国際会議録
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6
国際会議録
Contact-free on-axis metrology for the fabrication and testing of complex optical systems [5965-36]
SPIE - The International Society of Optical Engineering |
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