In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition (Invited Paper) [6325-16]
- 著者名:
- Wang, Y.
- Dai, M.
- Rivilon, S.
- Ho, M.-T.
- Chabal, Y. J. ( Rutgers Univ. (USA) )
- 掲載資料名:
- Physical Chemistry of Interfaces and Nanomaterials V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6325
- 発行年:
- 2006
- 開始ページ:
- 63250G
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464040 [081946404X]
- 言語:
- 英語
- 請求記号:
- P63600/6325
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
10
国際会議録
Development of microstructure in nanostructures and thin films (Keynote Paper,Invited Paper)
SPIE-The International Society for Optical Engineering | |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
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