Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift [6292-27]

著者名:

Hibino, K. ( National Institute of Advanced Industrial Science and Technology (Japan) )

Tani, Y. ( Univ. of Tokyo (Japan) )

Takatsuji, T.

Bitou, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )

Warisawa, S.

Mitsuishi, M. ( Univ. of Tokyo (Japan) )

さらに 1 件

掲載資料名:

Interferometry XIII: Techniques and Analysis

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6292

発行年:

2006

開始ページ:

62920Q

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463715 [081946371X]

言語:

英語

請求記号:

P63600/6292

資料種別:

国際会議録