Super-polished aluminum mirrors through the application of chemical mechanical polishing techniques [6288-21]
- 著者名:
- Moeggenborg,J. K.
- Vincer, T.
- Lesiak, S.
- Salij, R. ( Cabot Microelectronics Corp. (USA) )
- 掲載資料名:
- Current developments in lens design and optical engineering VII : 14-15 August 2006, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6288
- 発行年:
- 2006
- 開始ページ:
- 62880L
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463678 [0819463671]
- 言語:
- 英語
- 請求記号:
- P63600/6288
- 資料種別:
- 国際会議録
類似資料:
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