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Study on the precise time-grating displacement sensor [6280-11]

著者名:
掲載資料名:
Third International Symposium on Precision Mechanical Measurements
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6280
発行年:
2006
パート:
1
開始ページ:
62800B
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463517 [0819463515]
言語:
英語
請求記号:
P63600/6280
資料種別:
国際会議録

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