Development of a morphing structure with the incorporation of central pattern generators [6173-40]
- 著者名:
- Bliss, T. K. ( Univ. of Virginia (USA) )
- Bart-Smith, H ( Univ. of Virginia (USA) )
- Iwasaki, T. ( Univ. of Virginia (USA) )
- 掲載資料名:
- Smart structures and materials 2006 : Smart structures and integrated systems : 27 February-2 March 2006, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6173
- 発行年:
- 2006
- 開始ページ:
- 617312
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819462268 [0819462268]
- 言語:
- 英語
- 請求記号:
- P63600/6173
- 資料種別:
- 国際会議録
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12
国際会議録
Sub-40-nm pattern replication with 。゙20% process latitude by soft-contact x-ray lithography
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