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Impact of line width roughness on device performance [6152-32]

著者名:
Lorusso, G. F. ( IMEC (Belgium) )
Leunissen, L. H. A. ( IMEC (Belgium) )
Gustin, C. ( IMEC (Belgium) )
Mercha, A. ( IMEC (Belgium) )
Jurczak, M. ( IMEC (Belgium) )
Marchman, H. M. ( Photronics Inc. (USA) )
Azordegan, A. ( KLA-Lencor (USA) )
さらに 2 件
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6152
発行年:
2006
パート:
1
開始ページ:
61520W
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
言語:
英語
請求記号:
P63600/6152
資料種別:
国際会議録

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