Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas [6151-135]
- 著者名:
Fujioka, S. ( Osaka Univ. (Japan) ) Nishimura, H. ( Osaka Univ. (Japan) ) Ando, T. ( Osaka Univ. (Japan) ) Ueda, N ( Osaka Univ. (Japan) ) Namba, S. ( Hiroshima Univ.(Japan) ) Aota, T. ( Osaka Univ. (Japan) ) Murakami, M. ( Osaka Univ. (Japan) ) Nishihara,K. ( Osaka Univ. (Japan) ) Kang,Y. G. ( Osaka Univ. (Japan) ) Sunahara, A. ( Institute for Laser Technology (Japan) ) Furukawa,H. ( Institute for Laser Technology (Japan) ) Hashimoto,K. ( Institute for Laser Technology (Japan) ) Yamaura, M. ( Institute for Laser Technology (Japan) ) Yasuda, Y. ( Osaka Univ. (Japan) ) Nagai, K. ( Osaka Univ. (Japan) ) Norimatsu, T. ( Osaka Univ. (Japan) ) Miyanaga, N. ( Osaka Univ. (Japan) ) Izawa, Y. ( Osaka Univ. (Japan) ) Mima, K. ( Osaka Univ. (Japan) ) - 掲載資料名:
- Emerging Lithographic Technologies X
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6151
- 発行年:
- 2006
- パート:
- 2
- 開始ページ:
- 61513V
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- 言語:
- 英語
- 請求記号:
- P63600/6151
- 資料種別:
- 国際会議録
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