UV -nanoimprint lithography using a diamond-like carbon stamp [6151-92]

UV -nanoimprint lithography using a diamond-like carbon stamp [6151-92]

著者名:

Jeong, J. ( Korea Institute of Machinery and Materials (South Korea) )

Kim, K. ( Korea Institute of Machinery and Materials (South Korea) )

Sim, Y. ( Korea Institute of Machinery and Materials (South Korea) )

Choi, D. ( Korea Institute of Machinery and Materials (South Korea) )

Lee, E. ( Korea Institute of Machinery and Materials (South Korea) )

Park, S. ( Korea Advanced Institute of Science and Technology (South Korea) )

Lim, T. ( Korea Advanced Institute of Science and Technology (South Korea) )

Yang, D. ( Korea Advanced Institute of Science and Technology (South Korea) )

さらに 3 件

掲載資料名:

Emerging Lithographic Technologies X

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6151

発行年:

2006

パート:

2

開始ページ:

61512J

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461940 [0819461946]

言語:

英語

請求記号:

P63600/6151

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016183
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Emerging Lithographic Technologies
回次:	2006 : 10th
会議開催地:	San Jose, CA, USA
会議開催年:	2006.02.21-2006.02.23

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2 国際会議録 Ultra-violet nanoimprint lithography applicable to thin-film transistor liquid-crystal display J. Jeong, K. Kim, D. Choi, J. Choi, E. Lee SPIE - The International Society of Optical Engineering	8 国際会議録 Accurate alignment technique for nanoimprint lithography Kang, H.-B., Kim, J.-M., Kim, Y.-D., Cho, H.-J., Choi, S.-S. SPIE - The International Society of Optical Engineering
3 国際会議録 Effect of Diamond-Like Carbon Overcoats on VOR Performance Lee, J.-W, Kim, S.H., Park, Y.S., Shinn, M.N., Kang, D.H., Voon, S.Y, Kim, D.S., Park, T.S., Ha, S.H., Lee, J.-H., Kim, … Electrochemical Society	9 国際会議録 Step and Repeat UV nanoimprint lithography tools and processes McMackin, I., Choi, J., Schumaker, P., Nguyen, V., Xu, F., Thompson, E., Babbs, D., Sreenivasan, S.V., Watts, M., … SPIE - The International Society of Optical Engineering
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