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Performance of a high-stroke segmented MEMS deformable-mirror technology (Invited Paper) [6113-21]

著者名:
掲載資料名:
MEMS/MOEMS Components and Their Applications III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6113
発行年:
2006
開始ページ:
61130L
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461551 [0819461555]
言語:
英語
請求記号:
P63600/6113
資料種別:
国際会議録

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